Press Release 

AIXTRON successfully installed AIXTRON Planetary Reactor in Sony

Aachen / Atsugi, Japan, 9^th August, 2004 - AIXTRON is delighted to announce the purchase and successful start-up of an AIX 2600G3 system by Sony. The system is capable to grow on multiple wafer configurations ranging from 3" to 6" diameter and is equipped for processing various compound semiconductor devices. The system includes an EpiRAS 2000TT sensor for in-situ measurement of doping, composition, thickness and true temperature during the epitaxial growth.

The AIX 2600G3 system proves its high performance such as, a highly versatile tool equally well suited for R&D purposes as for high-volume production with respect to the large process window, high reproducibility and uniformity of epitaxial growth. Furthermore, the EpiRAS allows the control the epitaxial process, which is essential for the development of next generation's devices and their subsequent transfer to mass-production. AIXTRON provides customer service and support by its Japanese subsidiary and the headquarter in Aachen."

Dr. Frank Schulte, former Director of AIXTRON K.K. and new Manager Product Marketing adds: "We are pleased that a highly renowned company like Sony opts for the AIXTRON Planetary Reactor and we are sure that our system will even exceed their expectations. The capability to grow various kinds of highest quality materials as well as its excellent reproducibility together with a low cost of ownership makes AIXTRON's Planetary Reactor the perfect choice for our customer."

About AIXTRON

AIXTRON is, as verified by an independent market research institute, the world leading supplier of equipment for semiconductor epitaxy. Its equipment is used by a diverse range of customers worldwide to manufacture critical, advanced components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors and VCSELs used in fiber optic communications systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading edge technologies. AIXTRON AG (FSE: AIX ISIN DE0005066203) is listed in the Prime Standard and Tec-DAX of the German Stock Exchange (Deutsche Börse) and is included in the MSCI World Index.

Forward Looking Information
This news release may contain forward-looking statements about the business, financial condition, results of operations and earnings outlook of AIXTRON within the meaning of the "safe harbor" provisions of the United States Private Securities Litigation Reform Act of 1995. Words such as "may," "will," "expect," "anticipate," "contemplate," "intend," "plans," "believe," "continue" and "estimate," and variations of these words and similar expressions, identify these forward-looking statements. These statements are not guarantees of future performance, involve certain risks, uncertainties and assumptions that are difficult to predict, and are based upon assumptions as to future events that may not prove accurate. Therefore, actual outcomes and results may differ materially from what is expressed herein. In any forward-looking statement in which AIXTRON expresses an expectation or belief as to future results, such expectation or belief is expressed in good faith and believed to have a reasonable basis, but there can be no assurance that the statement or expectation or belief will result or be achieved or accomplished. Actual operating results may differ materially from such forward-looking statements and are subject to certain risks, including risks arising from: actual customer orders received by AIXTRON; the extent to which metal-organic chemical vapor deposition, or MOCVD, technology is demanded by the market place; the timing of final acceptance of products by customers; the financial climate and accessibility of financing; general conditions in the thin film equipment market and in the macro-economy; cancellations, rescheduling or delays in product shipments; manufacturing capacity constraints; lengthy sales and qualification cycles; difficulties in the production process; changes in semiconductor industry growth; increased competition; exchange rate fluctuations; availability of government funding; variability and availability of interest rates; delays in developing and commercializing new products; general economic conditions being less favorable than expected; and other factors. The forward-looking statements contained in this news release are made as of the date hereof and AIXTRON does not assume any obligation to (and expressly disclaims any such obligation to) update the reasons why actual results could differ materially from those projected in the forward-looking statements. Any reference to the Internet website of AIXTRON is not an incorporation by reference of such information in this news release, and you should not interpret such a reference as an incorporation by reference of such information.

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© AIXTRON AG, August 9th, 2004

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